Invention Grant
- Patent Title: Method for fabricating a micromechanical component
- Patent Title (中): 微机械部件的制造方法
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Application No.: US09302224Application Date: 1999-04-29
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Publication No.: US06268232B1Publication Date: 2001-07-31
- Inventor: Helmut Skapa , Horst Muenzel , Franz Laermer , Michael Offenberg , Heinz-Georg Vossenberg
- Applicant: Helmut Skapa , Horst Muenzel , Franz Laermer , Michael Offenberg , Heinz-Georg Vossenberg
- Priority: DE19819456 19980430
- Main IPC: H01L2100
- IPC: H01L2100

Abstract:
A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate, in which a patterned circuit trace layer is buried. A conductive layer, including a first region and a second region, is provided on the insulation layer, and a movable element is configured in the first region by forming a first plurality of trenches and by using an etching agent to remove at least one portion of the insulation layer from underneath the conductive layer. A contact element is formed and electrically connected to the circuit trace layer in the second region by configuring a second plurality of trenches, and the resultant movable element is encapsulated in the first region. The second plurality of trenches for forming the contact element in the second region is first formed after the encapsulation of the movable element formed in the first region.
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