Invention Grant
US06374671B1 Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed 失效
激励用于电容测量强度,加速度和/或转速的振荡器控制的方法

  • Patent Title: Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed
  • Patent Title (中): 激励用于电容测量强度,加速度和/或转速的振荡器控制的方法
  • Application No.: US09254502
    Application Date: 1999-10-26
  • Publication No.: US06374671B1
    Publication Date: 2002-04-23
  • Inventor: Bruno RyrkoGünter SpahlingerWalter Gutmann
  • Applicant: Bruno RyrkoGünter SpahlingerWalter Gutmann
  • Priority: DE19635923 19960904
  • Main IPC: G01P904
  • IPC: G01P904
Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed
Abstract:
For the drive excitation, the method for the capacitive drive excitation of oscillators in sensors for the capacitive measurement of force, acceleration and, in particular, rotation rates according to the Coriolis principle, provides according to the invention for the use of high-frequency constant-amplitude pulse packets with no DC component, the width or phase angle of which can be adjusted in order to keep the oscillator speed constant, for the purpose of resetting or correcting tolerances. As an alternative, the method may also be configured in such a way that, in the case of oscillators with pairwise excitation electrodes which are symmetrical with respect to the rotation axis, equal constant-amplitude HF voltages are applied, the frequency of which is chosen to be substantially higher than the natural frequency of the oscillator, in which case a particular resulting force of attraction on the oscillator is brought about by shifting the phase angle between the drive voltages and, in the case of rotation rate sensors working according to the closed-loop principle, system resetting can also be ensured. By virtue of the invention, problems with coupling the excitation signal into the read channel of a micromechanical oscillator system can be brought well under control.
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