Invention Grant
- Patent Title: Method of fabricating row lines of a field emission array and forming pixel openings therethrough
-
Application No.: US09944231Application Date: 2001-08-30
-
Publication No.: US06406927B2Publication Date: 2002-06-18
- Inventor: Ammar Derraa
- Applicant: Ammar Derraa
- Main IPC: H01L2100
- IPC: H01L2100

Abstract:
A method for fabricating row lines over a field emission array employs only two mask steps to define row lines and pixel openings. A layer of conductive material is disposed over a substantially planarized surface of a grid of semiconductive material and a layer of passivation material is disposed over the layer of conductive material. Row lines and pixel openings may be formed through the passivation and conductive layers by use of a first mask. The row lines may be further defined by using a second mask to remove semiconductive material of the grid. Alternatively, a first mask may be used to fully define row lines from the layers of passivation, conductive, and semiconductive material, while a second mask may be used to define pixel openings through the layers of passivation and conductive material. Field emission arrays fabricated by such methods are also disclosed.
Public/Granted literature
- US20020006679A1 Method of fabricating row lines of a field emission array and forming pixel openings therethrough Public/Granted day:2002-01-17
Information query