Method for determining laser-induced compaction in fused silica

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US06543254B2 Method for determining laser-induced compaction in fused silica 失效

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Patent Title: Method for determining laser-induced compaction in fused silica
Application No.: US09964987

Application Date: 2001-09-26
Publication No.: US06543254B2

Publication Date: 2003-04-08
Inventor: Douglas C. Allan , Nicholas F. Borrelli , William R. Powell , Thomas P. Seward, III , Charlene M. Smith
Applicant: Douglas C. Allan , Nicholas F. Borrelli , William R. Powell , Thomas P. Seward, III , Charlene M. Smith
Main IPC: C03B1116
IPC: C03B1116

Method for determining laser-induced compaction in fused silica

Abstract:

The invention relates to fused silica having low compaction under high energy irradiation, particularly adaptable for use in photolithography applications.

Public/Granted literature

US20020036188A1 Method for determining laser-induced compaction in fused silica Public/Granted day:2002-03-28

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