Invention Grant
- Patent Title: Confocal microscope and height measurement method using the same
- Patent Title (中): 共焦显微镜和高度测量方法使用相同
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Application No.: US10146836Application Date: 2002-05-16
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Publication No.: US06580518B2Publication Date: 2003-06-17
- Inventor: Yukio Eda , Nahoko Hisata , Terumasa Morita , Yasuhiro Kamihara
- Applicant: Yukio Eda , Nahoko Hisata , Terumasa Morita , Yasuhiro Kamihara
- Priority: JP2000-275085 20000911; JP2000-275089 20000911; JP2000-275090 20000911
- Main IPC: G01B1114
- IPC: G01B1114

Abstract:
A confocal microscope is provided which uses a confocal disk. The confocal microscope includes a light source, a high-NA and low-magnification objective lens which forms an image of the confocal disk obtained by irradiation with a light from the light source on a sample, and a first image formation lens system disposed between the confocal disk and the objective lens. A first image formation lens driving mechanism is provided for moving the first image formation lens system in a light axis direction and adjusting a focal point position of the objective lens with respect to the sample, and a second image formation lens system is provided which forms a sectioning image formed on the confocal disk into an image by photoelectric conversion.
Public/Granted literature
- US20020167723A1 Confocal microscope and height measurement method using the same Public/Granted day:2002-11-14
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