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US06580518B2 Confocal microscope and height measurement method using the same 失效
共焦显微镜和高度测量方法使用相同

Confocal microscope and height measurement method using the same
Abstract:
A confocal microscope is provided which uses a confocal disk. The confocal microscope includes a light source, a high-NA and low-magnification objective lens which forms an image of the confocal disk obtained by irradiation with a light from the light source on a sample, and a first image formation lens system disposed between the confocal disk and the objective lens. A first image formation lens driving mechanism is provided for moving the first image formation lens system in a light axis direction and adjusting a focal point position of the objective lens with respect to the sample, and a second image formation lens system is provided which forms a sectioning image formed on the confocal disk into an image by photoelectric conversion.
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