Invention Grant
US06642723B2 Apparatus monitoring the deposition of a liquid-to-pasty medium on a substrate 有权
设备监测液体到糊状介质在基底上的沉积

  • Patent Title: Apparatus monitoring the deposition of a liquid-to-pasty medium on a substrate
  • Patent Title (中): 设备监测液体到糊状介质在基底上的沉积
  • Application No.: US10241627
    Application Date: 2002-09-11
  • Publication No.: US06642723B2
    Publication Date: 2003-11-04
  • Inventor: Andreas Blank
  • Applicant: Andreas Blank
  • Priority: DE19937387 19990807
  • Main IPC: G01R2726
  • IPC: G01R2726
Apparatus monitoring the deposition of a liquid-to-pasty medium on a substrate
Abstract:
An apparatus for monitoring deposition of a liquid-to-pasty medium on a substrate has a sensor fitted with two electrodes and an electronic circuit connected to the sensor for generating a signal which is characteristic of the substrate and the medium. The electronic circuit measures the imaginary component of the electrical permittivity of the substrate moving, together with the medium, between the two electrodes, and uses the measured value to determine the characteristic signal.
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