Invention Grant
- Patent Title: Surface-micromachined rotatable member having a low-contact-area hub
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Application No.: US10098214Application Date: 2002-03-18
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Publication No.: US06649947B2Publication Date: 2003-11-18
- Inventor: M. Steven Rodgers , Jeffry J. Sniegowski , Thomas W. Krygowski
- Applicant: M. Steven Rodgers , Jeffry J. Sniegowski , Thomas W. Krygowski
- Main IPC: H01L2714
- IPC: H01L2714

Abstract:
A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.
Public/Granted literature
- US20020096018A1 Surface-micromachined rotatable member having a low-contact-area hub Public/Granted day:2002-07-25
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