Invention Grant
US06674081B2 Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same 失效
红外线检测元件,红外二维图像传感器及其制造方法

Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same
Abstract:
An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.
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