Invention Grant
- Patent Title: Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens
- Patent Title (中): 无缺陷的电介质涂层及其使用聚合氮杂原子的制备
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Application No.: US09808724Application Date: 2001-03-14
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Publication No.: US06685983B2Publication Date: 2004-02-03
- Inventor: Craig Jon Hawker , James Lupton Hedrick , Elbert Emin Huang , Victor Yee-Way Lee , Teddie Magbitang , David Mecerreyes , Robert Dennis Miller , Willi Volksen
- Applicant: Craig Jon Hawker , James Lupton Hedrick , Elbert Emin Huang , Victor Yee-Way Lee , Teddie Magbitang , David Mecerreyes , Robert Dennis Miller , Willi Volksen
- Main IPC: B05D302
- IPC: B05D302

Abstract:
Defect-free dielectric coatings comprised of porous polymeric matrices are prepared using nitrogen-containing polymers as pore-generating agents. The dielectric coatings are useful in a number of contexts, including the manufacture of electronic devices such as integrated circuit devices and integrated circuit packaging devices. The dielectric coatings are prepared by admixing, in a solvent, a polymeric nitrogenous porogen with a high temperature, thermosetting host polymer miscible therewith, coating a substrate surface with the admixture, heating the uncured coating to cure the host polymer and provide a vitrified, two-phase matrix, and then decomposing the porogen. The dielectric coatings so prepared have few if any defects, and depending on the amount and molecular weight of porogen used, can be prepared so as to have an exceptionally low dielectric constant on the order of 2.5 or less, preferably less than about 2.0. Integrated circuit devices and integrated circuit packaging devices manufactured so as to contain the dielectric material of the invention are provided as well.
Public/Granted literature
- US20020131246A1 Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens Public/Granted day:2002-09-19
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