Invention Grant
- Patent Title: Process for manufacturing integrated chemical microreactors of semiconductor material
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Application No.: US09874382Application Date: 2001-06-04
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Publication No.: US06710311B2Publication Date: 2004-03-23
- Inventor: Flavio Villa , Ubaldo Mastromatteo , Gabriele Barlocchi , Mauro Cattaneo
- Applicant: Flavio Villa , Ubaldo Mastromatteo , Gabriele Barlocchi , Mauro Cattaneo
- Priority: EP00830400 20000605
- Main IPC: C12M134
- IPC: C12M134

Abstract:
The microreactor is completely integrated and is formed by a semiconductor body having a surface and housing at least one buried channel accessible from the surface of the semiconductor body through two trenches. A heating element extends above the surface over the channel and a resist region extends above the heating element and defines an inlet reservoir and an outlet reservoir. The reservoirs are connected to the trenches and have, in cross-section, a larger area than the trenches. The outlet reservoir has a larger area than the inlet reservoir. A sensing electrode extends above the surface and inside the outlet reservoir.
Public/Granted literature
- US20020017660A1 Process for manufacturing integrated chemical microreactors of semiconductor material Public/Granted day:2002-02-14
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