Invention Grant
- Patent Title: Thermal micro-actuator based on selective electrical excitation
- Patent Title (中): 基于选择性电激励的热微致动器
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Application No.: US10137771Application Date: 2002-04-30
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Publication No.: US06739132B2Publication Date: 2004-05-25
- Inventor: Susan C. Bromley , Bradley J. Nelson , Karl Vollmers , Arunkumar Subramanian , Eniko Enikov , Kamal Deep Mothilal
- Applicant: Susan C. Bromley , Bradley J. Nelson , Karl Vollmers , Arunkumar Subramanian , Eniko Enikov , Kamal Deep Mothilal
- Main IPC: F01B2910
- IPC: F01B2910
Abstract:
A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.
Public/Granted literature
- US20030200749A1 Thermal micro-actuator based on selective electrical excitation Public/Granted day:2003-10-30
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