Invention Grant
US06744510B2 Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment 失效
椭圆偏振器和精密自动对准方法用于椭圆偏振仪的入射角,无需辅助设备

  • Patent Title: Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment
  • Patent Title (中): 椭圆偏振器和精密自动对准方法用于椭圆偏振仪的入射角,无需辅助设备
  • Application No.: US10040372
    Application Date: 2002-01-09
  • Publication No.: US06744510B2
    Publication Date: 2004-06-01
  • Inventor: Dae Gab GweonSung Lim ParkJae Wha Jeong
  • Applicant: Dae Gab GweonSung Lim ParkJae Wha Jeong
  • Main IPC: G01J400
  • IPC: G01J400
Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment
Abstract:
An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.
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