Invention Grant
US06750775B2 Integrated sensor having plurality of released beams for sensing acceleration and associated methods
有权
集成传感器具有多个用于感测加速度和相关方法的释放光束
- Patent Title: Integrated sensor having plurality of released beams for sensing acceleration and associated methods
- Patent Title (中): 集成传感器具有多个用于感测加速度和相关方法的释放光束
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Application No.: US09792962Application Date: 2001-02-26
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Publication No.: US06750775B2Publication Date: 2004-06-15
- Inventor: Tsiu Chiu Chan , Melvin Joseph DeSilva
- Applicant: Tsiu Chiu Chan , Melvin Joseph DeSilva
- Main IPC: G08B2100
- IPC: G08B2100

Abstract:
An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction of movement. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to and positioned adjacent the switch detecting circuit region. The sensor switching region preferably includes a plurality of floating contacts positioned adjacent and lengthwise extending outwardly from said switch detecting circuit region for defining a plurality of released beams so that each of said plurality of released beams displaces in a predetermined direction responsive to acceleration. The plurality of released beams preferably includes at least two released beams lengthwise extending outwardly from the switch detecting circuit region to different predetermined lengths and at least two released beams lengthwise extending outwardly from the switch detecting circuit region to substantially the same predetermined lengths. The methods of forming an integrated sensor advantageously are preferably compatible with know integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.
Public/Granted literature
- US20020008296A1 Integrated sensor having plurality of released beams for sensing acceleration and associated methods Public/Granted day:2002-01-24
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