Invention Grant
US06765660B2 System and method for measuring the quality of an illumination field from a laser line illumination system 有权
用于测量来自激光线照明系统的照明场的质量的系统和方法

  • Patent Title: System and method for measuring the quality of an illumination field from a laser line illumination system
  • Patent Title (中): 用于测量来自激光线照明系统的照明场的质量的系统和方法
  • Application No.: US10424026
    Application Date: 2003-04-28
  • Publication No.: US06765660B2
    Publication Date: 2004-07-20
  • Inventor: John F. Nolan
  • Applicant: John F. Nolan
  • Main IPC: G01J100
  • IPC: G01J100
System and method for measuring the quality of an illumination field from a laser line illumination system
Abstract:
A system is disclosed for analyzing an illumination field of a line of laser illumination. The system includes a first movable unit, a second movable unit, and a sensor unit. The first movable unit includes a first opening through which at least a portion of the illumination field may pass. The first movable unit is adapted for movement in a first direction. The sensor unit is adapted to receive illumination and to produce a sensor output signal representative a characteristic of the illumination field. The second movable unit includes a second opening through which at least a portion of the illumination field may pass. The second movable unit is positioned between the first movable unit and the sensor unit and is adapted for movement between at least a first position in which very little or no light from the illumination field may reach the sensor unit, and a second position in which a relatively high amount of light from the illumination field may reach the sensor unit.
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