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US06780073B2 Method of manufacturing electron-emitting device, electron source and image-forming apparatus, and apparatus of manufacturing electron source 失效
制造电子发射器件，电子源和图像形成装置的方法以及制造电子源的装置

  • Patent Title: Method of manufacturing electron-emitting device, electron source and image-forming apparatus, and apparatus of manufacturing electron source
  • Patent Title (中): 制造电子发射器件，电子源和图像形成装置的方法以及制造电子源的装置
  • Application No.: US10112720
    Application Date: 2002-04-02
  • Publication No.: US06780073B2
    Publication Date: 2004-08-24
  • Inventor: Miki Tamura , Toshikazu Ohnishi , Kazuhiro Jindai
  • Applicant: Miki Tamura , Toshikazu Ohnishi , Kazuhiro Jindai
  • Priority: JP11-047803 19990225; JP2000-047625 20000224
  • Main IPC: H01J900
  • IPC: H01J900
Method of manufacturing electron-emitting device, electron source and image-forming apparatus, and apparatus of manufacturing electron source
Abstract:
A method of manufacturing an electron-emitting device includes a process for forming a pair of electric conductors spaced from each other on a substrate, and an activation process for forming a film of carbon or a carbon compound on at least one of the pair of electric conductors. The activation process is sequentially performed within plural containers having different atmospheres.
Abstract(Chinese):

一种制造电子发射器件的方法包括在衬底上形成彼此间隔开的一对电导体的工艺，以及用于在所述一对电极中的至少一个上形成碳或碳化合物的膜的活化工艺 导体 激活过程在具有不同气氛的多个容器内依次进行。

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