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US06809392B2 Micromachined device having electrically isolated components and a method for making the same 失效
具有电隔离部件的微加工装置及其制造方法

  • Patent Title: Micromachined device having electrically isolated components and a method for making the same
  • Patent Title (中): 具有电隔离部件的微加工装置及其制造方法
  • Application No.: US10371899
    Application Date: 2003-02-20
  • Publication No.: US06809392B2
    Publication Date: 2004-10-26
  • Inventor: Mark G. Allen , Charles C. Chung
  • Applicant: Mark G. Allen , Charles C. Chung
  • Main IPC: H01L31058
  • IPC: H01L31058
Micromachined device having electrically isolated components and a method for making the same
Abstract:
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
Abstract(Chinese):

具有电隔离组分的微加工结构通过通过衬底热掺杂掺杂剂形成，以在衬底内形成掺杂区域。 掺杂区域分离衬底的两部分。 选择掺杂剂使得掺杂区域通过结隔离将衬底的两个部分彼此电隔离。

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