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US06942844B2 Method and facility for producing silane 失效
生产硅烷的方法和设备

Method and facility for producing silane
Abstract:
Silane is produced in a continuous process by disproportionating trichlorsilane in at least 2 recreation areas for reaction/distillation, which are run through by a countercurrent of steam and liquid in the presence of catalytically active solid under a pressure which ranges between 500 mbar and 50 bar.
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