Invention Grant
- Patent Title: Ozonated water flow and concentration control method
- Patent Title (中): 臭氧水流量和浓度控制方法
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Application No.: US10938455Application Date: 2004-09-10
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Publication No.: US06948504B2Publication Date: 2005-09-27
- Inventor: Jens Fittkau , Johannes Seiwert , Christiane Gottschalk
- Applicant: Jens Fittkau , Johannes Seiwert , Christiane Gottschalk
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Proskauer Rose LLP
- Main IPC: B01F1/00
- IPC: B01F1/00 ; C01B13/00 ; C01B13/10 ; C02F1/78 ; G05D21/00 ; H01L21/02 ; H01L21/304 ; B08B3/04
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Public/Granted literature
- US20050029202A1 Ozonated water flow and concentration control apparatus and method Public/Granted day:2005-02-10
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