Invention Grant
US06985233B2 Method and apparatus for compact Fabry-Perot imaging spectrometer
有权
紧凑法布里 - 珀罗成像光谱仪的方法和装置
- Patent Title: Method and apparatus for compact Fabry-Perot imaging spectrometer
- Patent Title (中): 紧凑法布里 - 珀罗成像光谱仪的方法和装置
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Application No.: US10893230Application Date: 2004-07-19
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Publication No.: US06985233B2Publication Date: 2006-01-10
- Inventor: David Tuschel , Patrick J. Treado , Chenhui Wang
- Applicant: David Tuschel , Patrick J. Treado , Chenhui Wang
- Applicant Address: US PA Pittsburgh
- Assignee: ChemImage Corporation
- Current Assignee: ChemImage Corporation
- Current Assignee Address: US PA Pittsburgh
- Agency: Duane Morris LLP
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method and apparatus for compact Fabry-Perot imaging spectrometer is presented. More specifically, in one embodiment, a tunable Fabry-Perot optical filter for providing a spatially accurate wavelength-resolved image of a sample having two spatial dimensions is presented. The optical filter may include plural filter elements having an initial predetermined spacing between adjacent filter elements; and a micro electro-mechanical system (“MEMS”) actuator. One of the plural filter elements may be attached to the MEMS actuator so that the actuator is capable of moving the one filter element relative to another of the plural filter elements to thereby tune the Fabry-Perot optical filter.
Public/Granted literature
- US20050030545A1 Method and apparatus for compact Fabry-Perot imaging spectrometer Public/Granted day:2005-02-10
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