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US07005775B2 Microfabricated torsional drive utilizing lateral electrostatic force 失效
使用横向静电力的微型扭转驱动

  • Patent Title: Microfabricated torsional drive utilizing lateral electrostatic force
  • Patent Title (中): 使用横向静电力的微型扭转驱动
  • Application No.: US10142821
    Application Date: 2002-05-09
  • Publication No.: US07005775B2
    Publication Date: 2006-02-28
  • Inventor: Chang Feng Wan
  • Applicant: Chang Feng Wan
  • Main IPC: H02N1/00
  • IPC: H02N1/00 G02B26/08
Microfabricated torsional drive utilizing lateral electrostatic force
Abstract:
The present invention is related to a novel micro-electro-mechanical systems (MEMS) torsional drive that is capable of tilting suspended structure such as a micro-mirror for steering light beams in three-dimensional analog fashion, which is suitable for high port count optical switches. The torsional drive has the advantages of allowing large tilt angle, having low drive voltage, and capable of providing a feedback signal for closed-loop control.
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