Invention Grant
- Patent Title: Microfabricated torsional drive utilizing lateral electrostatic force
- Patent Title (中): 使用横向静电力的微型扭转驱动
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Application No.: US10142821Application Date: 2002-05-09
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Publication No.: US07005775B2Publication Date: 2006-02-28
- Inventor: Chang Feng Wan
- Applicant: Chang Feng Wan
- Main IPC: H02N1/00
- IPC: H02N1/00 ; G02B26/08

Abstract:
The present invention is related to a novel micro-electro-mechanical systems (MEMS) torsional drive that is capable of tilting suspended structure such as a micro-mirror for steering light beams in three-dimensional analog fashion, which is suitable for high port count optical switches. The torsional drive has the advantages of allowing large tilt angle, having low drive voltage, and capable of providing a feedback signal for closed-loop control.
Public/Granted literature
- US20050002084A1 Micro-electro-mechanical systems torsional drive Public/Granted day:2005-01-06
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