Invention Grant
- Patent Title: Polishing using multi-metal oxide nanopowders
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Application No.: US10292263Application Date: 2002-11-12
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Publication No.: US07029507B2Publication Date: 2006-04-18
- Inventor: Tapesh Yadav , Karl Pfaffenbach
- Applicant: Tapesh Yadav , Karl Pfaffenbach
- Applicant Address: US CO Longmont
- Assignee: NanoProducts Corporation
- Current Assignee: NanoProducts Corporation
- Current Assignee Address: US CO Longmont
- Agency: Hogan & Hartson L.L.P.
- Agent Kent A. Lembke
- Main IPC: B24D3/02
- IPC: B24D3/02 ; C09C1/68 ; C09K3/14
Abstract:
Polishing powders of nanoscale dimensions are disclosed. Complex, multi-metal oxides are disclosed as constituents for chemical mechanical planarization, (CMP) as well as polishes for optical components, photonic devices, and other applications.
Public/Granted literature
- US20030132420A1 Polishing using multi-metal oxide nanopowders Public/Granted day:2003-07-17
Information query
