Invention Grant
- Patent Title: Method of producing a nanotube layer on a substrate
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Application No.: US10101650Application Date: 2002-03-20
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Publication No.: US07033650B2Publication Date: 2006-04-25
- Inventor: Klaus Mauthner , Xinhe Tang , Roland Haubner
- Applicant: Klaus Mauthner , Xinhe Tang , Roland Haubner
- Applicant Address: AT Klosterneuburg
- Assignee: Electrovac, Fabrikation, Elektrotechnischer Spezialartikel, Gesellschaft mbH
- Current Assignee: Electrovac, Fabrikation, Elektrotechnischer Spezialartikel, Gesellschaft mbH
- Current Assignee Address: AT Klosterneuburg
- Agent Henry M. Feiereisen; Ursula B. Day
- Priority: AT1667/99 19990929
- Main IPC: D01F9/127
- IPC: D01F9/127 ; C23C16/26 ; C23C16/46
Abstract:
In a method of producing a nanotube layer on a substrate by using a CVD process, the substrate is placed in a reaction chamber, which is flushed with a carbon-containing gas. Subsequently, the substrate is heated by an induction process to a temperature at which carbon from the gas phase is deposited on the substrate while forming nanotubes thereon.
Public/Granted literature
- US20020102353A1 Method of producing a nanotube layer on a substrate Public/Granted day:2002-08-01
Information query
