Invention Grant
- Patent Title: Interferometry method and apparatus for producing lateral metrology images
-
Application No.: US10419061Application Date: 2003-04-18
-
Publication No.: US07068376B2Publication Date: 2006-06-27
- Inventor: Peter J. De Groot
- Applicant: Peter J. De Groot
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method including: generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface; and calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image. The final image can be useful as a lateral metrology image. The method may further include calculating a surface topography image from the sequence of phase-shifted interferometry images. Embodiments further include apparatus related to the method.
Public/Granted literature
- US20030197871A1 Interferometry method and apparatus for producing lateral metrology images Public/Granted day:2003-10-23
Information query