Invention Grant
US07095010B2 Silicon on insulator resonator sensors and modulators and method of operating the same
有权
绝缘体上的绝缘体传感器和调制器及其操作方法
- Patent Title: Silicon on insulator resonator sensors and modulators and method of operating the same
- Patent Title (中): 绝缘体上的绝缘体传感器和调制器及其操作方法
-
Application No.: US10729242Application Date: 2003-12-04
-
Publication No.: US07095010B2Publication Date: 2006-08-22
- Inventor: Axel Scherer , Alex Dickinson
- Applicant: Axel Scherer , Alex Dickinson
- Applicant Address: US CA Pasedena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasedena
- Agency: Myers Dawes Andras & Sherman
- Agent Daniel L. Dawes
- Main IPC: G01J1/04
- IPC: G01J1/04 ; G02B6/00

Abstract:
A microsensor for sensing a substance comprises a substrate, a source of light, an optical microresonator or semiconductor optical ring microresonator fabricated in the substrate exposed to the substance to allow an interaction between the microresonator and substance, a waveguide coupling the source of light to the optical microresonator, and a detector coupled to the microresonator to measure the resonant frequency of the microresonator, the absorption loss of whispering gallery modes in the microresonator or the quality factor of the microresonator, which are sensitive to interaction of the substance with the optical microresonator. A polymer coating disposed on the microresonator is reactive with the substance. The microsensor may comprise a plurality of microresonators corresponding to a plurality of different resonant frequencies to generate an absorption spectrum of the substance.
Public/Granted literature
- US20040146431A1 Silicon on insulator resonator sensors and modulators and method of operating the same Public/Granted day:2004-07-29
Information query