Invention Grant
- Patent Title: Optical system for measurement
- Patent Title (中): 用于测量的光学系统
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Application No.: US10785055Application Date: 2004-02-25
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Publication No.: US07102753B2Publication Date: 2006-09-05
- Inventor: Etsuo Kawate
- Applicant: Etsuo Kawate
- Applicant Address: JP Ibaraki
- Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP Ibaraki
- Agency: Rader, Fishman & Grauer, PLLC
- Priority: JP2003-051084 20030227
- Main IPC: G01N21/55
- IPC: G01N21/55

Abstract:
In an optical system, first and second optical paths intersected with each other on a sample holder are set, wherein the first and second optical paths are formed so that light from a light source is projected to be converged on the intersection from an incoming side beam switching mirror that selectively switches a direction of the light via one of first and second converged light reflectors, first and second received light reflectors that projects the light to an exiting side beam switching mirror disposed on the first and second optical paths respectively, the exiting side beam switching mirror switches a direction of the light projected from one of the first and second received light reflectors, and intensity of light from the sample in case of face side incidence and back side incidence to the sample can be measured.
Public/Granted literature
- US20040169863A1 Optical system for measurement Public/Granted day:2004-09-02
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