- Patent Title: Modulated reflectance measurement system with multiple wavelengths
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Application No.: US11302674Application Date: 2005-12-14
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Publication No.: US07116424B2Publication Date: 2006-10-03
- Inventor: Lena Nicolaides , Jeffrey T. Fanton , Alex Salnik , Jon Opsal
- Applicant: Lena Nicolaides , Jeffrey T. Fanton , Alex Salnik , Jon Opsal
- Applicant Address: US CA Fremont
- Assignee: Therma-Wave, Inc.
- Current Assignee: Therma-Wave, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Stallman & Pollock LLP
- Main IPC: G01N21/55
- IPC: G01N21/55

Abstract:
A modulated reflectance measurement system includes three monochromatic diode-based lasers. Each laser can operate as a probe beam or as a pump beam source. The laser outputs are redirected using a series of mirrors and beam splitters to reach an objective lens. The objective lens focuses the laser outputs on a sample. Reflected energy returns through objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A Processor uses the Q and/or I signals to analyze the sample. By changing the number of lasers used as pump or probe beam sources, the measurement system can be optimized to measure a range of different samples types.
Public/Granted literature
- US20060092425A1 Modulated reflectance measurement system with multiple wavelengths Public/Granted day:2006-05-04
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