Invention Grant
US07159448B2 Combustion-chamber pressure sensor having a metallic diaphragm containing a piezoresistive, thin metallic layer 失效
燃烧室压力传感器具有包含压阻薄金属层的金属隔膜

Combustion-chamber pressure sensor having a metallic diaphragm containing a piezoresistive, thin metallic layer
Abstract:
A pressure sensor for measuring the pressure in a space acted upon by high pressure. The signals detected by the pressure sensor are supplied to evaluation electronics. A sensor diaphragm is accommodated on the end of the pressure sensor pointing towards the space acted upon by high pressure. The sensor diaphragm takes the form of a steel diaphragm, to whose back side a thin, metallic layer accommodating piezoresistive measuring elements is applied. The thin, metallic layer is contacted by transmission elements and connected to the evaluation electronics.
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