Invention Grant
- Patent Title: Apparatus for optical system coherence testing
- Patent Title (中): 光学系统相干测试装置
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Application No.: US11139479Application Date: 2005-05-31
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Publication No.: US07161684B2Publication Date: 2007-01-09
- Inventor: Matthew E. Hansen
- Applicant: Matthew E. Hansen
- Applicant Address: NL
- Assignee: ASML Holding, N.V.
- Current Assignee: ASML Holding, N.V.
- Current Assignee Address: NL
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the laser beam is measured by illuminating the test reticle and recording and/or analyzing the optical patterns generated by the illumination. The technique was designed for the characterization of laser-based systems via the detection of optical radiation modulated by transmissive, reflective and diffractive patterns printed on a reticle or lithographic plate designed specifically for this purpose. The novelty and advantages over the prior art are insensitivity to vibration, alignment, and multi-path differences associated with classical interferometric coherence measurement techniques. The technique is focus error insensitive. The robustness and convenience of the technique is driven by the use of a single plate with no optical alignment, making the technique easily implemented in the field.
Public/Granted literature
- US20050219550A1 Apparatus for optical system coherence testing Public/Granted day:2005-10-06
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