Invention Grant
US07166963B2 Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
失效
用于发射紫外线和/或真空紫外线辐射的无电极灯
- Patent Title: Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
- Patent Title (中): 用于发射紫外线和/或真空紫外线辐射的无电极灯
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Application No.: US10937947Application Date: 2004-09-10
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Publication No.: US07166963B2Publication Date: 2007-01-23
- Inventor: Alan Janos , Malcolm Pack , Mohammad Kamarchi , Michael B. Colson
- Applicant: Alan Janos , Malcolm Pack , Mohammad Kamarchi , Michael B. Colson
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Cantor Colburn LLP
- Main IPC: H01J61/30
- IPC: H01J61/30 ; H01J17/16 ; H01J9/24
Abstract:
An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.
Public/Granted literature
- US20060055300A1 Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation Public/Granted day:2006-03-16
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