Invention Grant
- Patent Title: Nanofabrication
- Patent Title (中): 纳米加工
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Application No.: US10098222Application Date: 2002-03-14
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Publication No.: US07189435B2Publication Date: 2007-03-13
- Inventor: Mark Tuominen , Mustafa Bal , Thomas P. Russell , Andrei Ursache
- Applicant: Mark Tuominen , Mustafa Bal , Thomas P. Russell , Andrei Ursache
- Applicant Address: US MA Boston
- Assignee: University of Massachusetts
- Current Assignee: University of Massachusetts
- Current Assignee Address: US MA Boston
- Agency: Fish & Richardson P.C.
- Main IPC: H01F41/30
- IPC: H01F41/30 ; C23C18/00 ; H05K3/00 ; H01B13/00 ; B82B3/00

Abstract:
Pathways to rapid and reliable fabrication of three-dimensional nanostructures are provided. Simple methods are described for the production of well-ordered, multilevel nanostructures. This is accomplished by patterning block copolymer templates with selective exposure to a radiation source. The resulting multi-scale lithographic template can be treated with post-fabrication steps to produce multilevel, three-dimensional, integrated nanoscale media, devices, and systems.
Public/Granted literature
- US20020158342A1 Nanofabrication Public/Granted day:2002-10-31
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