Invention Grant
- Patent Title: Apparatus and method for investigating or modifying a surface with a beam of charged particles
- Patent Title (中): 用带电粒子束调查或修改表面的装置和方法
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Application No.: US11106368Application Date: 2005-04-14
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Publication No.: US07232997B2Publication Date: 2007-06-19
- Inventor: Klaus Edinger , Josef Sellmair , Thorsten Hofmann
- Applicant: Klaus Edinger , Josef Sellmair , Thorsten Hofmann
- Applicant Address: DE Rossdorf
- Assignee: NaWoTec GmbH
- Current Assignee: NaWoTec GmbH
- Current Assignee Address: DE Rossdorf
- Agency: Meyertons Hood Kivlin Kowert & Goetzel, P.C.
- Agent Jeffrey C. Hood
- Priority: EP04008972 20040415
- Main IPC: G01N23/00
- IPC: G01N23/00
Abstract:
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.
Public/Granted literature
- US20050230621A1 Apparatus and method for investigating or modifying a surface with a beam of charged particles Public/Granted day:2005-10-20
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