Invention Grant
- Patent Title: Illumination system with a grating element
- Patent Title (中): 具有光栅元件的照明系统
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Application No.: US09961819Application Date: 2001-09-24
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Publication No.: US07248667B2Publication Date: 2007-07-24
- Inventor: Markus Weiss , Wolfgang Singer , Bernd Kleemann
- Applicant: Markus Weiss , Wolfgang Singer , Bernd Kleemann
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- Priority: DE10127298 20010606
- Main IPC: G21K5/04
- IPC: G21K5/04 ; G21K1/06 ; G02B27/44
Abstract:
An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.
Public/Granted literature
- US20020186811A1 Illumination system with a grating element Public/Granted day:2002-12-12
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