Invention Grant
- Patent Title: Ozonated water flow and concentration control apparatus and method
- Patent Title (中): 臭氧水流量和浓度控制装置及方法
-
Application No.: US11207989Application Date: 2005-08-19
-
Publication No.: US07264006B2Publication Date: 2007-09-04
- Inventor: Jens Fittkau , Johannes Seiwert , Christiane Gottschalk
- Applicant: Jens Fittkau , Johannes Seiwert , Christiane Gottschalk
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Proskauer Rose LLP
- Main IPC: B08B3/04
- IPC: B08B3/04
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Public/Granted literature
- US20060107969A1 Ozonated water flow and concentration control apparatus and method Public/Granted day:2006-05-25
Information query
IPC分类:
