Invention Grant
- Patent Title: Process for forming MEMS
- Patent Title (中): MEMS成型工艺
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Application No.: US11019912Application Date: 2004-12-21
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Publication No.: US07264984B2Publication Date: 2007-09-04
- Inventor: Raffi Garabedian , Salleh Ismail , Nim Hak Tea , Tseng-Yang Hsu , Melvin B Khoo , Weilong Tang
- Applicant: Raffi Garabedian , Salleh Ismail , Nim Hak Tea , Tseng-Yang Hsu , Melvin B Khoo , Weilong Tang
- Applicant Address: US CA Baldwin Park
- Assignee: Touchdown Technologies, Inc.
- Current Assignee: Touchdown Technologies, Inc.
- Current Assignee Address: US CA Baldwin Park
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/302

Abstract:
The present invention relates to a process for forming microstructures on a substrate. A plating surface is applied to a substrate. A first layer of photoresist is applied on top of the plating base. The first layer of photoresist is exposed to radiation in a pattern to render the first layer of photoresist dissolvable in a first pattern. The dissolvable photoresist is removed and a first layer of primary metal is electroplated in the area where the first layer of photoresist was removed. The remainder of the photoresist is then removed and a second layer of photoresist is then applied over the plating base and first layer of primary metal. The second layer of photoresist is then exposed to a second pattern of radiation to render the photoresist dissolvable and the dissolvable photoresist is removed. The second pattern is an area that surrounds the primary structure, but it does not entail the entire substrate. Rather it is an island surrounding the primary metal. The exposed surface of the secondary metal is then machined down to a desired height of the primary metal. The secondary metal is then etched away.
Public/Granted literature
- US20060134819A1 Process for forming MEMS Public/Granted day:2006-06-22
Information query
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