Invention Grant
- Patent Title: Gas supplying apparatus
- Patent Title (中): 供气装置
-
Application No.: US10801852Application Date: 2004-03-17
-
Publication No.: US07303141B2Publication Date: 2007-12-04
- Inventor: Kyu-hee Han , Sang-wook Yoo , Suk-chan Lee
- Applicant: Kyu-hee Han , Sang-wook Yoo , Suk-chan Lee
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Staas & Halsey LLP
- Priority: KR10-2003-0022366 20030409
- Main IPC: B05B17/00
- IPC: B05B17/00

Abstract:
A gas supplying apparatus for supplying deposition gas onto a substrate surface, the gas supplying apparatus comprising: a gas supplying ring with one or more gas supplying channels formed along the interior of the gas supplying ring and with a plurality of gas distribution channels directed toward a center of the gas supplying ring; and a plurality of adapters with gas nozzles connecting to the gas distribution channels, respectively, that detachably connect to the interior of the gas supplying ring, wherein the gas nozzles have a variety of injection configurations.
Public/Granted literature
- US20040217217A1 Gas supplying apparatus Public/Granted day:2004-11-04
Information query