Invention Grant
- Patent Title: Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing
- Patent Title (中): 用于电化学机械加工和化学机械抛光的恒定低力晶片载体
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Application No.: US10654542Application Date: 2003-09-02
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Publication No.: US07316602B2Publication Date: 2008-01-08
- Inventor: Bulent M. Basol , Jalal Ashjaee , Konstantin Volodarsky
- Applicant: Bulent M. Basol , Jalal Ashjaee , Konstantin Volodarsky
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: B24B1/00
- IPC: B24B1/00
Abstract:
A carrier head for holding a workpiece during processing of a workpiece surface is provided. The carrier head includes a carrier housing, a base and a pressure member. The base is configured to hold the workpiece and is movable with respect to the carrier housing. The pressure member is between the base and the carrier housing and is configured to induce the base to apply a predetermined force onto the process surface.
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