Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US11194545Application Date: 2005-08-02
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Publication No.: US07348625B2Publication Date: 2008-03-25
- Inventor: Mu-Yi Liu , Tao-Cheng Lu
- Applicant: Mu-Yi Liu , Tao-Cheng Lu
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
An EEPROM cell includes first and second assist gates on opposite sides of a charge retaining insulating layer. Current in the EEPROM memory cell flows between inversion layers, which are created in response to a bias applied to the assist gates. The insulating layer can include silicon nitride, which is provided between layers of silicon dioxide above the channel region, such that these layers can constitute a dielectric stack, which can be fabricated to occupy a relatively small area.
Public/Granted literature
- US20060033149A1 Semiconductor device and method of manufacturing the same Public/Granted day:2006-02-16
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