Invention Grant
- Patent Title: Reducing the actuation voltage of microelectromechanical system switches
- Patent Title (中): 降低微机电系统开关的启动电压
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Application No.: US10185283Application Date: 2002-06-28
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Publication No.: US07358579B2Publication Date: 2008-04-15
- Inventor: Qing Ma , Tsung-Kuan Allen Chou , Valluri Rao
- Applicant: Qing Ma , Tsung-Kuan Allen Chou , Valluri Rao
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/82

Abstract:
A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations.
Public/Granted literature
- US20040000696A1 Reducing the actuation voltage of microelectromechanical system switches Public/Granted day:2004-01-01
Information query
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