Invention Grant
US07358579B2 Reducing the actuation voltage of microelectromechanical system switches 有权
降低微机电系统开关的启动电压

Reducing the actuation voltage of microelectromechanical system switches
Abstract:
A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations.
Information query
Patent Agency Ranking
0/0