Invention Grant
- Patent Title: Reticle-masking objective with aspherical lenses
- Patent Title (中): 带非球面透镜的掩模掩模物镜
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Application No.: US11534022Application Date: 2006-09-21
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Publication No.: US07372634B2Publication Date: 2008-05-13
- Inventor: Jurgen Grunwald
- Applicant: Johannes Wangler , Karl-Heinz Schuster , Alexander Sohmer , Alexander Epple , Christa Müller, legal representative , Jorg Schultz
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Darby & Darby P.C.
- Priority: DE19653983 19961212; DE10108677 20010223
- Main IPC: G02B3/00
- IPC: G02B3/00 ; G02B9/00
Abstract:
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.
Public/Granted literature
- US20070014028A1 RETICLE-MASKING OBJECTIVE WITH ASPHERICAL LENSES Public/Granted day:2007-01-18
Information query
