Invention Grant
- Patent Title: Irradiation device for testing objects coated with light-sensitive paint
- Patent Title (中): 用于测试涂有感光漆的物体的照射装置
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Application No.: US10530964Application Date: 2003-10-08
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Publication No.: US07378666B2Publication Date: 2008-05-27
- Inventor: Wolf-Dieter Domke , Larissa Juschkin , Karl Kragler , Rainer Lebert , Manfred Meisen
- Applicant: Wolf-Dieter Domke , Larissa Juschkin , Karl Kragler , Rainer Lebert , Manfred Meisen
- Applicant Address: DE Munich DE Aachen
- Assignee: Qimonda AG,AIXUV GmbH
- Current Assignee: Qimonda AG,AIXUV GmbH
- Current Assignee Address: DE Munich DE Aachen
- Agency: Slater & Matsil, L.L.P.
- Priority: DE10247626 20021011; DE10305573 20030210
- International Application: PCT/DE03/03381 WO 20031008
- International Announcement: WO2004/036312 WO 20040429
- Main IPC: G01J1/42
- IPC: G01J1/42

Abstract:
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.
Public/Granted literature
- US20060138311A1 Irradiation device for testing objects coated with light-sensitive paint Public/Granted day:2006-06-29
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