Invention Grant
- Patent Title: Acoustic resonator support, acoustic resonator and corresponding integrated circuit
- Patent Title (中): 声谐振器支撑，声谐振器和相应的集成电路
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Application No.: US10537283Application Date: 2003-11-27
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Publication No.: US07391142B2Publication Date: 2008-06-24
- Inventor: Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- Applicant: Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics S.A.
- Current Assignee: STMicroelectronics S.A.
- Current Assignee Address: FR Montrouge
- Agency: Gardere Wynne Sewell LLP
- Priority: FR0214967 20021128
- International Application: PCT/FR03/03500 WO 20031127
- International Announcement: WO2004/051848 WO 20040617
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
A support 7 for an acoustic resonator 4 includes at least one bilayer assembly having a layer of high acoustic impedance material 11 and a layer of low acoustic impedance material 12 made of material having a low electrical permittivity.
Public/Granted literature
- US20060226736A1 Acoustic resonator support, acoustic resonator and corresponding integrated circuit Public/Granted day:2006-10-12
Information query
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