Invention Grant
- Patent Title: Efficient EUV collector designs
- Patent Title (中): 高效的EUV收集器设计
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Application No.: US11054040Application Date: 2005-02-08
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Publication No.: US07405871B2Publication Date: 2008-07-29
- Inventor: Jose Sasian
- Applicant: Jose Sasian
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G02B5/08
- IPC: G02B5/08

Abstract:
A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.
Public/Granted literature
- US20060176547A1 Efficient EUV collector designs Public/Granted day:2006-08-10
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