Invention Grant
- Patent Title: Diffractive thin-film piezoelectric light modulator and method of fabricating the same
- Patent Title (中): 衍射薄膜压电光调制器及其制造方法
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Application No.: US11112733Application Date: 2005-04-22
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Publication No.: US07443076B2Publication Date: 2008-10-28
- Inventor: Min Suk Oh , Yun Jin Ko , Jong Sam Kim
- Applicant: Min Suk Oh , Yun Jin Ko , Jong Sam Kim
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Priority: KR10-2004-0099892 20041201
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support and of a micro-mirror. In addition, a method of fabricating the diffractive thin-film piezoelectric light modulator is also provided.
Public/Granted literature
- US20060113869A1 Diffractive thin-film piezoelectric light modulator and method of fabricating the same Public/Granted day:2006-06-01
Information query
IPC分类:
