Invention Grant
US07449276B2 Positive photoresist composition and method for forming resist pattern
有权
正型光致抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Positive photoresist composition and method for forming resist pattern
- Patent Title (中): 正型光致抗蚀剂组合物和形成抗蚀剂图案的方法
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Application No.: US10554380Application Date: 2004-04-22
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Publication No.: US07449276B2Publication Date: 2008-11-11
- Inventor: Takuma Hojo , Kiyoshi Ishikawa , Tsuyoshi Nakamura , Tasuku Matsumiya
- Applicant: Takuma Hojo , Kiyoshi Ishikawa , Tsuyoshi Nakamura , Tasuku Matsumiya
- Applicant Address: JP Kawasaki-Shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe, Martens Olson & Bear LLP
- Priority: JP2003-125241 20030430
- International Application: PCT/JP2004/005804 WO 20040422
- International Announcement: WO2004/097526 WO 20041111
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039

Abstract:
The invention provides a positive photoresist composition which exhibits a high level of etching resistance and attains high resolution, and enables the formation of a fine pattern using an electron beam exposure step, as well as a method for forming a resist pattern that uses the positive photoresist composition. This positive photoresist composition for use with EB contains a resin component (A) that exhibits increased alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), wherein the component (A) comprises a copolymer containing a first structural unit (a1) derived from hydroxystyrene and a second structural unit (a2) derived from a (meth)acrylate ester having an alcoholic hydroxyl group, and a portion of the hydroxyl groups of the structural units (a1) and the alcoholic hydroxyl groups of the structural units (a2) are protected with acid dissociable, dissolution inhibiting groups.
Public/Granted literature
- US20070042288A1 Positive photoresist composition and method for forming resist pattern Public/Granted day:2007-02-22
Information query
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