Invention Grant
- Patent Title: Semiconductor memory device having power decoupling capacitor
- Patent Title (中): 具有电源去耦电容器的半导体存储器件
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Application No.: US11361580Application Date: 2006-02-24
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Publication No.: US07462912B2Publication Date: 2008-12-09
- Inventor: Soon-Hong Ahn , Jung-Hwa Lee
- Applicant: Soon-Hong Ahn , Jung-Hwa Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR10-2005-0054365 20050623
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/00

Abstract:
Provided is a semiconductor memory device using a layout scheme where a bottom conductive layer in a peripheral circuit region, which is simultaneously formed with a self-align contact, is connected to one electrode of a power decoupling capacitor. Predetermined capacitors selected among a plurality of capacitors are connected to each other in parallel by using a conductive layer that is simultaneously formed with the self-align contact in a cell array region. Herein, the conductive layer and the self-align contact may be made of the same material. It is possible to embody the decoupling capacitor of a single stage cell type by connecting the conductive layer to a top interconnection layer. In addition, other embodiments implement the decoupling capacitor in a two-stage cell type by connecting a plurality of decoupling capacitors in series by means of the conductive layer in the peripheral circuit region.
Public/Granted literature
- US20060289932A1 Semiconductor memory device having power decoupling capacitor Public/Granted day:2006-12-28
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