Invention Grant
- Patent Title: Magnetron with graphite nano-fibers on cathode
- Patent Title (中): 带有石墨纳米纤维的磁控管在阴极上
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Application No.: US10912099Application Date: 2004-08-06
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Publication No.: US07474042B2Publication Date: 2009-01-06
- Inventor: Masayuki Aiga , Toshiyuki Tsukada
- Applicant: Masayuki Aiga , Toshiyuki Tsukada
- Applicant Address: JP Osaka
- Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JPP.2003-288752 20030807
- Main IPC: H01J1/62
- IPC: H01J1/62

Abstract:
A cathode substrate 10 is heated to 400 to 600° C. in the atmosphere of hydrocarbon gas such as methane and the gas is allowed to react with the surface of the cathode substrate 10 by a thermal CVD method. Thus, an electron emission source in which graphite nano-fibers 11 are allowed to grow in a gaseous-phase on the surface of the cathode substrate 10 by using nickel or iron existing on the surface of the cathode substrate 10 as a nucleus is held between upper and lower end hats 12 to form a cathode part 13.
Public/Granted literature
- US20050029917A1 Magnetron Public/Granted day:2005-02-10
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