Invention Grant
US07479689B2 Electronically programmable fuse having anode and link surrounded by low dielectric constant material
失效
具有由低介电常数材料包围的阳极和链节的电子可编程保险丝
- Patent Title: Electronically programmable fuse having anode and link surrounded by low dielectric constant material
- Patent Title (中): 具有由低介电常数材料包围的阳极和链节的电子可编程保险丝
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Application No.: US11627384Application Date: 2007-01-26
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Publication No.: US07479689B2Publication Date: 2009-01-20
- Inventor: Deok-Kee Kim , Xiangdong Chen , Haining Yang
- Applicant: Deok-Kee Kim , Xiangdong Chen , Haining Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Lisa Jaklitsch
- Main IPC: H01L23/58
- IPC: H01L23/58
Abstract:
An electronically programmable fuse (e-fuse) is disclosed. In one embodiment, the e-fuse includes a cathode surrounded only by silicon dioxide; an anode; and a polysilicon-silicide programmable link coupling the anode and the cathode, wherein the anode and the polysilicon-silicide programmable link are surrounded by a low dielectric constant (low-k) material on a top and a side thereof.
Public/Granted literature
- US20080179706A1 ELECTRONICALLY PROGRAMMABLE FUSE HAVING ANODE AND LINK SURROUNDED BY LOW DIELECTRIC CONSTANT MATERIAL Public/Granted day:2008-07-31
Information query
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