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US07555824B2 Method for large scale integration of quartz-based devices 有权
石英器件大规模集成方法

Method for large scale integration of quartz-based devices
Abstract:
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
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