Invention Grant
- Patent Title: Method for large scale integration of quartz-based devices
- Patent Title (中): 石英器件大规模集成方法
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Application No.: US11502336Application Date: 2006-08-09
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Publication No.: US07555824B2Publication Date: 2009-07-07
- Inventor: David T. Chang , Randall L. Kubena
- Applicant: David T. Chang , Randall L. Kubena
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: H04R31/00
- IPC: H04R31/00

Abstract:
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
Public/Granted literature
- US20080034575A1 Large area integration of quartz resonators with electronics Public/Granted day:2008-02-14
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