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US07566675B2 Corrosion-resistant material manufacturing method 失效
耐腐蚀材料的制造方法

Corrosion-resistant material manufacturing method
Abstract:
The present invention provides a method of manufacturing an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In production of the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.
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