Invention Grant
US07569819B2 Electron beam system and method of operating the same 失效
电子束系统及其操作方法

  • Patent Title: Electron beam system and method of operating the same
  • Patent Title (中): 电子束系统及其操作方法
  • Application No.: US11873639
    Application Date: 2007-10-17
  • Publication No.: US07569819B2
    Publication Date: 2009-08-04
  • Inventor: Norihisa Mori
  • Applicant: Norihisa Mori
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2006-282212 20061017; JP2007-138679 20070525
  • Main IPC: H01J37/26
  • IPC: H01J37/26
Electron beam system and method of operating the same
Abstract:
An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.
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